Top 10 Dry Screw Vacuum Pump Manufacturers in the World (2026)

Choosing the right dry screw vacuum pump manufacturer is an important decision for chemical plants, pharmaceutical manufacturers, semiconductor companies, coating facilities, battery manufacturers, vacuum drying systems, heat treatment plants, and industrial engineering contractors.

Dry screw vacuum pumps generate vacuum without oil or sealing liquid inside the compression chamber. Two synchronized screw rotors rotate without contact, transporting and compressing process gas from the inlet toward the exhaust. This oil-free operating principle helps reduce process contamination while supporting clean, efficient, and relatively low-maintenance vacuum operation.

Today, leading manufacturers provide dry screw pumps for applications ranging from general industrial vacuum and solvent recovery to semiconductor production and demanding chemical processes. However, suppliers differ significantly in pumping speed, ultimate pressure, screw profile, cooling design, corrosion resistance, process-gas handling capability, system integration, customization, and global service support.

This guide introduces 10 notable dry screw vacuum pump manufacturers in the world in 2026, helping international B2B buyers compare global brands and specialized manufacturers according to technology, product coverage, application capability, and industrial purchasing requirements.

Top 10 Dry Screw Vacuum Pump Manufacturers in the World at a Glance

1. Busch Vacuum Solutions

Busch Vacuum Solutions is one of the world's most recognized industrial vacuum technology manufacturers and offers an extensive portfolio of dry screw vacuum pumps through its COBRA product family.

The COBRA range includes multiple configurations such as COBRA NC, NF, DS, and DH dry screw vacuum pumps. Different models are designed for chemical processes, vacuum drying, heat treatment, coating, packaging, battery manufacturing, semiconductor production, and other demanding vacuum applications.

Busch dry screw pumps use non-contacting screw technology with no operating fluid inside the compression chamber. Selected models also offer variable-speed operation, different sealing configurations, coatings, gas ballast, cooling options, and versions suitable for demanding process gases.

Busch is particularly suitable for multinational industrial companies that prioritize established vacuum technology, broad product coverage, global service availability, and standardized equipment for large-scale installations.

Key Advantages

Advanced COBRA dry screw technology, broad pumping-speed range, options for demanding process gases, strong global service network, and suitability for industrial, chemical, coating, battery, packaging, and semiconductor applications.

2. DV VACUUM

DV VACUUM is a professional industrial vacuum pump and vacuum system manufacturer established in 2007. The company focuses on the R&D, production, and customization of vacuum pumps and integrated process vacuum solutions.

Its product portfolio includes Constant-Pitch Dry Screw Vacuum Pumps, Variable-Pitch Dry Screw Vacuum Pumps, Roots Vacuum Pumps, Circulatory Gas Cooled Roots Vacuum Pumps, Liquid Ring Vacuum Pumps, and complete customized vacuum systems.

For dry screw applications, DV VACUUM can provide different screw configurations according to operating pressure, pumping speed, process-gas characteristics, condensation conditions, temperature requirements, corrosion risks, and other application parameters. Dry screw technology allows the compression chamber to remain free from sealing oil, making these pumps particularly relevant to applications requiring clean and oil-free process vacuum.

A major advantage of DV VACUUM is its ability to provide more than a standalone dry screw pump. Depending on the required vacuum level and pumping capacity, the company can configure Roots-dry screw vacuum systems, multi-stage vacuum packages, skid-mounted systems, process condensers, separators, instrumentation, valves, and customized control solutions.

Its manufacturing and engineering capabilities are particularly useful for chemical, pharmaceutical, new energy, electronics, vacuum drying, distillation, solvent recovery, and other process industries where the vacuum system must be configured according to the actual production conditions rather than selected only from a standard catalog.

For international buyers comparing European and Japanese global brands with factory-direct Chinese manufacturers, DV VACUUM offers an attractive combination of customization flexibility, integrated vacuum system engineering, OEM support, direct manufacturer communication, and competitive industrial sourcing.

Key Advantages

Constant-pitch and variable-pitch dry screw vacuum pumps, customized Roots-dry screw vacuum systems, process-oriented engineering support, integrated skid-mounted vacuum packages, OEM and customization capability, and suitability for international B2B industrial projects.

3. Leybold

Leybold is a long-established German vacuum technology manufacturer with an extensive portfolio of oil-free industrial vacuum equipment.

Its dry vacuum portfolio includes product families such as DRYVAC, VARODRY, SCREWLINE, LEYVAC, and related engineered dry vacuum systems. The DRYVAC range is designed for demanding applications requiring compact construction, reliable process performance, and hermetically sealed operation.

Leybold dry screw pumps are widely used for coating, drying, steam sterilization, heat treatment, electron-beam welding, modified-atmosphere packaging, and industrial process vacuum.

Leybold is a strong option for buyers prioritizing advanced engineering, established global service infrastructure, standardized high-performance vacuum equipment, and integration with Roots boosters and high-vacuum systems.

Key Advantages

Extensive dry vacuum portfolio, DRYVAC and VARODRY product families, strong industrial engineering experience, global service network, and suitability for sophisticated industrial vacuum installations.

4. Edwards Vacuum

Edwards Vacuum is a major global vacuum technology company with decades of experience in dry pumping technology.

Its dry screw portfolio includes GXS, EDS, IDX, and EXS dry screw vacuum pumps. These series serve applications ranging from general industrial vacuum to challenging chemical processes and high-throughput manufacturing environments.

Selected Edwards dry screw technologies are designed for demanding chemical and industrial applications and can be configured with process controls, purge systems, cooling arrangements, and pump-plus-booster combinations.

Applications include fine chemicals, pharmaceuticals, heat treatment, coating, metallurgy, drying, plastic extrusion, solar manufacturing, and other process industries.

Key Advantages

Wide dry screw product range, strong contaminant-handling capability, advanced screw designs, pump and booster systems, monitoring and process controls, and extensive international application experience.

5. Atlas Copco

Atlas Copco provides industrial dry screw vacuum pumps designed around energy efficiency, intelligent monitoring, compact installation, and reliable continuous operation.

The company's DWS and DWS VSD+ dry screw vacuum pumps are designed for demanding industrial applications. Variable Speed Drive technology allows pumping performance to be adjusted according to actual process demand, helping reduce unnecessary energy consumption.

DWS VSD+ systems incorporate monitoring and control functions for operating status, timers, pressure control, and other parameters. The dry compression mechanism keeps oil out of the vacuum chamber and helps reduce process contamination.

Typical applications include freeze drying, electronics, automotive manufacturing, packaging, coating, solar production, plasma processes, vacuum chamber evacuation, and gas recovery.

Key Advantages

Variable-speed dry screw technology, intelligent monitoring, plug-and-play installation, oil-free compression chamber, energy-efficient operation, and suitability for automated industrial production environments.

6. EBARA

EBARA is a Japanese industrial technology group with a strong presence in precision machinery and dry vacuum equipment, particularly within semiconductor and electronics manufacturing.

Its dry vacuum pumps are engineered for clean manufacturing environments and continuous production processes that demand reliable pumping performance and low contamination risk.

EBARA has extensive experience supplying vacuum equipment for semiconductor fabrication, electronics production, thin-film processes, deposition, etching, and other advanced manufacturing applications.

The company is especially relevant to large semiconductor and electronics manufacturers that prioritize process stability, installed-base experience, global technical support, and integration with advanced production equipment.

Key Advantages

Strong semiconductor specialization, extensive dry vacuum experience, precision manufacturing expertise, global service capability, and suitability for advanced electronics and clean production environments.

7. Elmo Rietschle

Elmo Rietschle is a German vacuum and pressure technology manufacturer offering several families of dry-running screw vacuum pumps for industrial use.

Its screw portfolio includes VSI, IDS, VSB, and SVT series. The pumps use contact-free screw compression technology with no lubrication required inside the pumping chamber.

Different models support process-critical industrial applications, packaging, drying, central vacuum systems, and general manufacturing processes requiring continuous oil-free vacuum.

Elmo Rietschle is particularly suitable for users who value low maintenance, clean vacuum generation, simple integration, energy efficiency, and standardized industrial equipment.

Key Advantages

Oil-free screw pumping technology, broad industrial product portfolio, variable-speed options, low maintenance requirements, vapor-handling capability, and suitability for packaging, drying, and general industrial processes.

8. ULVAC

ULVAC is a major Japanese vacuum technology manufacturer with extensive experience in semiconductor equipment, coating systems, electronics production, and industrial vacuum technology.

The company's LS Series dry screw vacuum pumps combine dry screw compression with a compact design intended to provide high pumping speed, reduced noise, energy efficiency, and lower maintenance requirements.

ULVAC's broader vacuum technology portfolio also allows dry pumps to be integrated with process equipment, high-vacuum components, gauges, and complete vacuum systems.

The company is particularly relevant to buyers working in semiconductor, display, electronics, coating, research, and advanced manufacturing industries.

Key Advantages

Strong semiconductor and electronics experience, dry screw technology, high-speed pumping, compact and energy-efficient designs, and extensive supporting vacuum equipment portfolio.

9. Pfeiffer Vacuum

Pfeiffer Vacuum is a German vacuum technology manufacturer serving industrial, scientific, semiconductor, coating, and high-vacuum markets.

Its screw vacuum technology uses counter-rotating screw rotors operating without contact or oil inside the compression chamber. Dry screw pumps can provide stable pumping performance through a wide operating range and can also serve as backing pumps for Roots vacuum boosters.

Pfeiffer provides integrated vacuum solutions for semiconductor manufacturing and other technically demanding processes, combining dry pumps with boosters and supporting vacuum components where required.

Applications include semiconductor manufacturing, metallurgy, freeze drying, coating, chemical processing, load-lock evacuation, crystal growing, and high-vacuum system backing.

Key Advantages

Strong high-vacuum system expertise, oil-free screw technology, semiconductor solutions, Roots booster integration, extensive vacuum component portfolio, and suitability for technically demanding installations.

10. Kashiyama Industries

Kashiyama Industries is a Japanese manufacturer specializing in dry vacuum pumps, particularly for semiconductor and advanced process applications.

The company is known for its screw pumping technology and offers product families including SDE, SDL, and MU dry vacuum pumps.

Selected models are designed for demanding processes requiring corrosion resistance, high pumping capacity, process durability, and reduced energy consumption. Different configurations are available according to pumping-speed and process requirements.

Kashiyama is particularly relevant to semiconductor manufacturers and equipment integrators that require specialized dry vacuum technology for continuous high-value production environments.

Key Advantages

Specialized dry vacuum manufacturing, screw technology, semiconductor process expertise, energy-efficient configurations, high-capacity product options, and a strong focus on advanced manufacturing.

How to Choose a Dry Screw Vacuum Pump Manufacturer ?

Selecting the right dry screw vacuum pump manufacturer requires more than comparing pumping speed and purchase price. The pump must be matched to the actual process gas, operating pressure, temperature, contamination load, corrosion conditions, and production requirements.

Pumping Speed and Operating Pressure

Determine the actual gas load, required evacuation time, continuous operating pressure, and ultimate vacuum requirement. A pump selected only according to maximum rated pumping speed may not provide the most efficient performance at the real operating point.

Constant-Pitch vs. Variable-Pitch Screw Design

Different screw profiles affect compression, thermal behavior, efficiency, and process tolerance. Variable-pitch designs progressively compress gas along the screw profile and can help optimize discharge temperature and energy consumption for suitable applications. Constant-pitch designs can provide a relatively simple and robust configuration for appropriate process conditions.

Process Gas Composition

Evaluate water vapor, solvents, corrosive gases, powders, condensable vapors, toxic gases, and other process contaminants. Purge gas, coatings, material selection, temperature control, and upstream condensation may be required for challenging processes.

Cooling and Temperature Control

Cooling arrangements should be evaluated together with gas composition, ambient conditions, inlet temperature, compression ratio, and process requirements. Stable thermal management is particularly important in continuous chemical and industrial applications.

Roots Booster Integration

Applications requiring higher pumping speeds or lower operating pressures may use a Roots vacuum booster combined with a dry screw backing pump. This configuration is widely used in industrial vacuum drying, distillation, coating, metallurgy, and other large-capacity vacuum systems.

Complete Vacuum System Engineering

Many industrial projects require more than a standalone pump. Condensers, filters, separators, receivers, valves, instruments, control cabinets, piping, Roots boosters, nitrogen purge systems, and skid structures may need to be engineered as one complete vacuum package.

Maintenance and After-Sales Support

Buyers should also compare spare-parts availability, service intervals, technical documentation, remote troubleshooting, commissioning assistance, maintenance guidance, and long-term support capability.

Conclusion

The global dry screw vacuum pump market includes large multinational vacuum technology groups as well as specialized manufacturers focused on particular applications, regions, and customized industrial systems.

Busch, Leybold, Edwards, and Atlas Copco provide broad industrial dry screw portfolios supported by extensive global service networks. EBARA, ULVAC, Pfeiffer Vacuum, and Kashiyama are particularly relevant to semiconductor, electronics, and technologically demanding vacuum applications.

For buyers looking for a flexible factory-direct manufacturer capable of supplying both standalone dry screw pumps and complete engineered vacuum packages, DV VACUUM is particularly worth considering. Its combination of Constant-Pitch and Variable-Pitch Dry Screw Vacuum Pumps, Roots Vacuum Pumps, Circulatory Gas Cooled Roots Vacuum Pumps, Liquid Ring Vacuum Pumps, and customized vacuum systems enables complete vacuum solutions to be configured according to actual process conditions.

This flexibility is especially valuable for chemical processing, pharmaceuticals, vacuum drying, distillation, solvent recovery, new energy, electronics, and other industrial processes where a standardized vacuum pump alone may not meet the complete system requirements.

Ultimately, the best dry screw vacuum pump manufacturer should be selected according to pumping capacity, required vacuum level, process-gas composition, corrosion resistance, thermal control, energy consumption, system integration, maintenance strategy, and long-term technical support rather than purchase price alone.